The paper introduces TRACE-GPT, a model for pre-training time-series sensor data and detecting faults in semiconductor manufacturing. It addresses challenges of abnormal data scarcity, small training data, and mixed normal types. The model outperforms unsupervised models on open datasets and process logs. It combines temporal convolutional embedding and Generative Pre-trained Transformers for effective anomaly detection.
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by Sewoong Lee,... alle arxiv.org 03-28-2024
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